Title:
GREASE, AND METHOD OF PRODUCING GREASE
Document Type and Number:
Japanese Patent JP2015030842
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a grease with reduced vaporization and dust emission and used for producing a semiconductor device, and a method of producing the same.SOLUTION: A grease is made by allowing a grease-like composition comprising fluorine-based or silicone-based base oil and thickener to be kept at a temperature of 160°C or more and 250°C or less and a pressure of 133.3 Pa or less for 8 hours or longer. Preferably the temperature is equal to 200°C or more.
Inventors:
NAGAIKE HIROSHI
Application Number:
JP2013163995A
Publication Date:
February 16, 2015
Filing Date:
August 07, 2013
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
C10M169/02; C10M107/38; C10M107/50; C10M177/00
Domestic Patent References:
| JP2003206937A | 2003-07-25 | |||
| JPH1046183A | 1998-02-17 | |||
| JP2012082321A | 2012-04-26 | |||
| JP2004083797A | 2004-03-18 | |||
| JPH0598281A | 1993-04-20 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Junji Kashioka
Yoshiki Kuroki
Junji Kashioka