Title:
GREEN SHEET FORMING DEVICE
Document Type and Number:
Japanese Patent JPH05309623
Kind Code:
A
Abstract:
PURPOSE: To obtain a green sheet forming device which can form a uniform coating film while preventing a variation in coating film thickness in the forming of the coating film using doctor blades.
CONSTITUTION: A third blade 6 is provided between a first blade 4 and a second blade 5. In this manner, since a level is kept constant and a flow of a slurry is stabilized between the third blade 6 and the first blade 4, a uniform coating film can be obtained.
Inventors:
KANBE YOSHIKI
Application Number:
JP12151692A
Publication Date:
November 22, 1993
Filing Date:
May 14, 1992
Export Citation:
Assignee:
NEC CORP
International Classes:
B28B1/30; H01L41/39; (IPC1-7): B28B1/30; H01L41/24
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)