Title:
GRINDER FOR WAFER-LIKE MATERIAL
Document Type and Number:
Japanese Patent JPS5287790
Kind Code:
A
Abstract:
PURPOSE: To obtain pieces with fewer surface flaws by lifting up a plate within the range of its dynamical friction resistance during the rotation of a grinder.
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Inventors:
TSUKAHARA MASARU
NAKAMOTO KAZUHISA
HORIKOU HITOSHI
NAKAMOTO KAZUHISA
HORIKOU HITOSHI
Application Number:
JP411576A
Publication Date:
July 22, 1977
Filing Date:
January 19, 1976
Export Citation:
Assignee:
HITACHI LTD
International Classes:
B24B37/04; B24B37/10; B24B37/30; (IPC1-7): B24B37/04; B24B41/06