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Patent Searching and Data


Title:
GRINDING DEVICE AND GRINDING METHOD
Document Type and Number:
Japanese Patent JP2005342837
Kind Code:
A
Abstract:

To provide a simple grinding device and a grinding method capable of grinding a surface of a grounded element with waviness along the waviness without computer controlling.

The grinding device includes (1) a rotating spindle, (2) a disc holder provided on a lower surface of the rotating spindle, and (3) an elastic pad attached to the disc holder and having (i) a curved end portion, (ii) a disc-shaped flexible plastic sheet attached to the elastic pad and having a diameter slightly larger than that of an elastomer elastic plate, and (iii) a multilayer element stuck to a lower surface of the plastic sheet and made from a sheet grinding wheel including a grinding abrasive layer having a diameter smaller than that of the plastic sheet.


Inventors:
WATANABE JUNJI
Application Number:
JP2004165577A
Publication Date:
December 15, 2005
Filing Date:
June 03, 2004
Export Citation:
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Assignee:
KUMAMOTO TECH & IND FOUND
International Classes:
B24B29/00; H01L21/304; (IPC1-7): B24B29/00; H01L21/304