To solve a problem wherein a manufacturing device of an optical element deforming by self weight does not exist since a surface shape measured in a mounted state on a machining machine is different from a surface shape in an incorporated state because supporting state and load distribution are different from a case where an object to be ground is mounted on a workpiece supporting tool of the machining machine, when incorporating a large optical element into a large telescope, etc.
This grinding device manufactures the optical element deforming by self weight. The grinding device is provided with the workpiece supporting tool having a rear face opposed to a grinding face of an object to be ground to be the optical element and a workpiece supporting surface of a closely adhered shape in a grinding state. In the workpiece supporting tool, the workpiece supporting surface is provided with an opening part, and a plurality of piezoactuator incorporation holes having an center axis directed in the vertical direction are provided at prescribed hole arrangement positions. In each of the piezoactuator incorporation holes, a piezoactuator and a load cell are elevatably incorporated.
KURITA MIKIO
IWAMURO FUMIHIDE
SHIMONO JUNJI
MAIHARA TOSHINORI
TOKORO HITOSHI
NAKAJIMA HISASHI
| JP2005305621A | 2005-11-04 | |||
| JPH01138563U | 1989-09-21 |