To provide a grinding device for feeding grinding fluid to around a process point constantly even when thickness of a workpiece varies.
The grinding device includes a chuck table for retaining the workpiece, and a grinding means for grinding the workpiece retained at the chuck table. The grinding means includes a moving base that can move in a vertical direction, a grinding feed means that moves the moving base in the vertical direction, a spindle housing that is fixed at the moving base, a spindle that is housed in the spindle housing to rotate freely, a motor that rotates and drives the spindle, a grinding wheel attached to the top end of the spindle and to which a grinding tool is fixed at a free end, and a grinding fluid feeding pipe having a nozzle at the top end and attached to either the moving base or the spindle housing. The grinding fluid feed pipe is extended into the inner side of the grinding wheel during grinding the workpiece, and the grinding fluid is discharged from the nozzle toward a position in which the workpiece abuts to the grinding tool.
JPH07223152A | 1995-08-22 | |||
JPH11347934A | 1999-12-21 | |||
JP2002273660A | 2002-09-25 | |||
JP2002129176A | 2002-05-09 | |||
JP2008119797A | 2008-05-29 | |||
JP2007245315A | 2007-09-27 | |||
JP2004200526A | 2004-07-15 | |||
JPH07223152A | 1995-08-22 | |||
JPH11347934A | 1999-12-21 | |||
JP2002273660A | 2002-09-25 | |||
JP2002129176A | 2002-05-09 | |||
JP2008119797A | 2008-05-29 |
Kenji Ito
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