Title:
GRINDING DEVICE
Document Type and Number:
Japanese Patent JP2021176661
Kind Code:
A
Abstract:
To provide a grinding device which can clean a base of a grinding wheel.SOLUTION: A grinding device 1 includes an ultrasonic cleaning unit 30. The ultrasonic cleaning unit 30 has side walls 31 and 32 which surround the inside and outside of a base 25 and a grinding stone 26, a bottom face 33 which connects the side walls 31 and 32, a spraying port 34-5 which is formed at least in the side walls 31 and 32 or the bottom face 33 and jets cleaning fluid 51 toward at least the base 25 or the grinding stone 26, a cleaning fluid supply section 35 which supplies the cleaning fluid 51 to the spraying port 34-5, an ultrasonic vibrator 36 which gives ultrasonic waves to the cleaning fluid 51 supplied from the cleaning fluid supply section 35, and a power supply section 37 which applies power to the ultrasonic vibrator 36.SELECTED DRAWING: Figure 3
Inventors:
HIRAIWA TAKU
TAKEDA NOBORU
TAKEDA NOBORU
Application Number:
JP2020082216A
Publication Date:
November 11, 2021
Filing Date:
May 07, 2020
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B23Q11/00; B24B53/007; B24B7/00; B24B53/02; B24B55/06; H01L21/304
Attorney, Agent or Firm:
Sakai International Patent Office