Title:
Grinding device
Document Type and Number:
Japanese Patent JP6262593
Kind Code:
B2
Inventors:
Fumi Nakamura
Osamu Nagai
Shinji Yoshida
Osamu Nagai
Shinji Yoshida
Application Number:
JP2014087140A
Publication Date:
January 17, 2018
Filing Date:
April 21, 2014
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B49/12; B24B7/04; B24B7/24; B24B51/00; H01L21/304
Domestic Patent References:
| JP201398498A | ||||
| JP2224968A |
Foreign References:
| US6071177 | ||||
| US6916525 |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi