Title:
Grinding device
Document Type and Number:
Japanese Patent JP6335596
Kind Code:
B2
Inventors:
Kazutaka Kuwana
Tomohisa Ishikawa
Kubo Tetsuo
Hiroyuki Kubo
Yusuke Mizuguchi
Nakayama Hidekazu
Tomohisa Ishikawa
Kubo Tetsuo
Hiroyuki Kubo
Yusuke Mizuguchi
Nakayama Hidekazu
Application Number:
JP2014078889A
Publication Date:
May 30, 2018
Filing Date:
April 07, 2014
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B7/04; B24B7/00; B24B49/02; B24B49/12; B24B53/00; B24B55/02; B24B55/12; H01L21/304; H01L21/677
Domestic Patent References:
| JP2011018802A | ||||
| JP2012069677A | ||||
| JP2002083794A | ||||
| JP2000334399A | ||||
| JP11330037A | ||||
| JP2013198960A | ||||
| JP2005153090A | ||||
| JP2010094785A | ||||
| JP2010172999A | ||||
| JP11245147A |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto