Title:
研削装置
Document Type and Number:
Japanese Patent JP6598668
Kind Code:
B2
Inventors:
Satoshi Yamanaka
Application Number:
JP2015248750A
Publication Date:
October 30, 2019
Filing Date:
December 21, 2015
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B7/04; B24B49/02; B24B49/04; B24B51/00; H01L21/304
Domestic Patent References:
| JP2010199227A | ||||
| JP2013202704A | ||||
| JP2006203132A |
Foreign References:
| US6168499 |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Amada Masayuki