Title:
研削装置
Document Type and Number:
Japanese Patent JP6887846
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a grinding device that facilitates a setting operation for dressing.SOLUTION: A grinding device 1 comprises: a dress board 51 that dresses a grind stone 21; first measuring means 8 that measures the height of the dress board 51; and second measuring means 9 that measures the height of the grind stone 21. On the basis of the measurement values obtained by the first and second measuring means 8, 9, the grinding device 1 brings the grind stone 21 and the dress board 51 close to each other up to an air cut distance before dressing.SELECTED DRAWING: Figure 1
Inventors:
Junichi Fukushima
Application Number:
JP2017063924A
Publication Date:
June 16, 2021
Filing Date:
March 28, 2017
Export Citation:
Assignee:
Tokyo Seimitsu Co., Ltd.
International Classes:
B24B53/00; B24B7/22; B24B49/10; B24B49/18; B24B53/02; H01L21/304
Domestic Patent References:
| JP2018149621A | ||||
| JP2003170338A | ||||
| JP2015020250A | ||||
| JP2016083707A | ||||
| JP5042478A | ||||
| JP2003257911A |
Attorney, Agent or Firm:
Takamitsu Shimizu