研削装置

Japanese Patent JP7067878

B2

To provide a grinding device that easily discharges grinding water out of annularly arranged grind stones.SOLUTION: A grinder 1 comprises grinding-water supply means 30. The grinding-water supply means 30 comprises: a through-passage 31 passing through a spindle 14 and a mount 13; and a grinding-water nozzle 32 disposed in the center, on a mounting face 13a side, of the mount 13, communicating with the through-passage 31, and discharging grinding water GW. The grinding-water nozzle 32 comprises: a cylindrical body 33 suspending from the mount 13; a water discharging part 34 formed at a free end 33a of the cylindrical body 33; and a guide part 35 by which grinding water GW flowing down in the through-passage 31 is guided so as to flow along an internal wall 33b of the cylindrical body 33. Since the water discharging part 34 includes a bevel part 34a for discharging grinding water GW divergently, the grinding water GW can be uniformly supplied toward the leading-end portion of the entire circumference of annularly arranged grind stones 12, and grinding water GW can easily be discharged outside the grind stones 12 through slight gaps between a to-be-ground surface of a wafer W and the grind stones 12.SELECTED DRAWING: Figure 2

Nobu Maejima
Kuwataka Kazuna
Suzuki Masaaki
Ryosuke Nishihara
Keimiko Kawamura

JP2017131102A

May 16, 2022

July 04, 2017

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Disco Co., Ltd.

B24B7/04; B24B49/08; B24B49/14; B24B55/02; B24B55/08; B24B57/02; H01L21/304

JP2009125915A
JP2011041987A
JP4109857U
JP2009094326A
JP52109291U

Patent Business Corporation Tokyo Alpa Patent Office

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