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Title:
GRINDING METHOD AND BLADE FOR GRINDING DEVICE
Document Type and Number:
Japanese Patent JPH05345266
Kind Code:
A
Abstract:

PURPOSE: To efficiently carry out grinding work by conveying a sample to a table for grinding with a first tip and then, by grinding it with a second tip which can carry out finer grinding than the first tip.

CONSTITUTION: A sample is mounted on a table and conveyed in the desired direction. A driving means rotates and drives a blade 30 in which a first tip 32a is provided opposed to the table separated by a predetermined distance so that the sample is brought into contact. Also, a second tip 32b which can carry out finer grinding than that by the first tip 32a is provided at the blade 30 ahead of the first tip 32a in the conveying direction and separated from the table by a predetermined distance. The sample is ground by the first tip 32a and then, further ground by the second tip 32b.


Inventors:
OKADA KOICHI
HASHIGUCHI TOSHIFUMI
Application Number:
JP15531392A
Publication Date:
December 27, 1993
Filing Date:
June 15, 1992
Export Citation:
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Assignee:
FUJITSU LTD
KYUSHU FUJITSU ELECTRONIC
International Classes:
B24B7/04; B24B7/22; B24D7/00; H01L21/304; (IPC1-7): B24B7/04; B24B7/22; B24D7/00; H01L21/304
Attorney, Agent or Firm:
Tadahiko Ito (2 outside)



 
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