Title:
矩形ワークの研削方法
Document Type and Number:
Japanese Patent JP7362212
Kind Code:
B2
Abstract:
To provide a method for grinding a rectangular workpiece that is able to easily reduce variation in thickness of the rectangular workpiece.SOLUTION: A grinding method for a rectangular workpiece, by which the rectangular workpiece is ground by a grinding wheel including a grinding stone, comprises: a protective member fixing step of fixing a protective member with a shape corresponding to the rectangular workpiece to a surface side of the rectangular workpiece; a first holding step of holding a rear surface side of the rectangular workpiece by means of a first holding table; a protective member grinding step of grinding the protective member to form a curved surface on the protective member; a second holding step of holding a curved surface side of the protective member by means of a second holding table; and a rectangular workpiece grinding step of grinding a rear surface side of the rectangular workpiece to form a curved surface on the rear surface side of the rectangular workpiece.SELECTED DRAWING: Figure 7
Inventors:
Keisuke Yamamoto
Itsuto Kiuchi
Itsuto Kiuchi
Application Number:
JP2020001192A
Publication Date:
October 17, 2023
Filing Date:
January 08, 2020
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B41/06; B24B7/04; H01L21/304
Domestic Patent References:
| JP2015205358A | ||||
| JP2019160903A | ||||
| JP2012161848A | ||||
| JP2014041963A |
Foreign References:
| US20190333799 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
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