Title:
GRINDING METHOD OF WORKPIECE
Document Type and Number:
Japanese Patent JP2019075408
Kind Code:
A
Abstract:
To prevent formation of scratch for the reverse face or occurrence of crack in a workpiece due to entrainment of exfoliated abrasive grains while grinding, in a grinding method for forming a ring-shaped reinforcement part on the reverse face of the workpiece.SOLUTION: A method of grinding the reverse face Wb of a workpiece W, having a device region Wa1 and an outer boundary excessive region Wa2 on the surface Wa, with a grind stone 42b includes a protective step of covering the surface Wa of the workpiece W with a protective member T1, a step of holding the protective member T1 side by the holding surface 30a of a table 30 rotating by a revolving shaft 33 inclining at an angle of 45-180 degrees for the vertical direction after execution of the protective step, and a grinding step of grinding the workpiece reverse face Wb, corresponding to the device region Wa1 with the grind stone 42b rotating by a revolving shaft 40 orthogonal to the holding surface 30a, while supplying the grinding water, thus forming a circular recess Wb1 and a ring-shaped reinforcement part Wb2 surrounding the circular recess Wb1. In the grinding step, draining of the grinding water containing the exfoliated abrasive grains is accelerated by gradient of the workpiece W.SELECTED DRAWING: Figure 4
Inventors:
KAKEFUDA MASAKI
Application Number:
JP2017198406A
Publication Date:
May 16, 2019
Filing Date:
October 12, 2017
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/304; B24B7/04; B24B41/06
Domestic Patent References:
| JPS6224952A | 1987-02-02 | |||
| JP2014154774A | 2014-08-25 | |||
| JP2013154443A | 2013-08-15 | |||
| JP2008028027A | 2008-02-07 | |||
| JP2015100865A | 2015-06-04 | |||
| JP2011083888A | 2011-04-28 |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office