Title:
GRINDING METHOD FOR WORKPIECE
Document Type and Number:
Japanese Patent JP2023158692
Kind Code:
A
Abstract:
To provide a grinding method for a workpiece, the grinding method enabling reduction of consumption amount of a grinding stone.SOLUTION: A grinding method for a workpiece is provided, for grinding a workpiece by using a grinding device. The grinding device comprises: a chuck table which holds the workpiece at a holding surface; a grinding unit which has a spindle in which a grinding wheel having a grinding stone is mounted to the distal end thereof; and a grinding surface adjustment unit which adjusts the state of the grinding surface side contacting the workpiece of the grinding stone. The grinding method includes: a holding step of holding the workpiece; and a grinding step of grinding the workpiece. In the grinding step, the grinding device grinds the workpiece while adjusting the state of the grinding stone by the grinding surface adjustment unit when a value corresponding to a grinding load is equal to or greater than a prescribed reference value, and grinds the workpiece without adjusting the state of the grinding stone by the grinding surface adjustment unit when the value corresponding to the grinding load is less than the prescribed reference value.SELECTED DRAWING: Figure 1
Inventors:
SUZUKI KEIICHI
Application Number:
JP2022068612A
Publication Date:
October 31, 2023
Filing Date:
April 19, 2022
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B53/00; B24B7/04; B24B49/10; B24B49/18; B24B53/12; H01L21/304
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato