Title:
GRINDING METHOD FOR WORK-PIECE
Document Type and Number:
Japanese Patent JP2023177443
Kind Code:
A
Abstract:
To provide a grinding method for a work-piece that can form a concave part so that a center of a surface to be ground of the work-piece matches with a center of a bottom surface of the concave part, even if the work-piece is carried in a position shifted from a desired position on a chuck table.SOLUTION: A displacement vector up to a center of a bottom surface of a preliminary concave part when viewed from a center of a surface to be ground of a work-piece is measured, after forming the preliminary concave part in the work-piece. A straight line acting as a rotating shaft of a chuck table passes on the center of the bottom surface of the preliminary concave part. This makes the displacement vector correspond to a displacement vector up to the straight line acting as the rotating shaft of the chuck table when viewed from the center of the surface to be ground of the work-piece. The concave part is formed in the work-piece, by making the chuck table hold the work-piece again after moving the chuck table and the work-piece relatively so that a position of the work-piece moves by a distance corresponding to the displacement vector.SELECTED DRAWING: Figure 2
Inventors:
SAITO YOSHINOBU
Application Number:
JP2022090120A
Publication Date:
December 14, 2023
Filing Date:
June 02, 2022
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B7/04; B24B1/00; H01L21/304
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
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