Title:
Grinding method
Document Type and Number:
Japanese Patent JP5948199
Kind Code:
B2
More Like This:
Inventors:
Tetsuji Togawa
Atsushi Yoshida
Yamashita Michiyoshi
Atsushi Yoshida
Yamashita Michiyoshi
Application Number:
JP2012210650A
Publication Date:
July 06, 2016
Filing Date:
September 25, 2012
Export Citation:
Assignee:
Ebara Corporation
International Classes:
B24B21/06
Domestic Patent References:
JP5166177A | ||||
JP3010757A |
Attorney, Agent or Firm:
Isamu Watanabe
Ryoji Kosugi
Tetsuya Hirosawa
Ryoji Kosugi
Tetsuya Hirosawa