Title:
Grinding method
Document Type and Number:
Japanese Patent JP6335592
Kind Code:
B2
Inventors:
Shinya Watanabe
Application Number:
JP2014076069A
Publication Date:
May 30, 2018
Filing Date:
April 02, 2014
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B55/02; B24B7/04; H01L21/304
Domestic Patent References:
| JP1115559A | ||||
| JP2004200526A | ||||
| JP11254281A | ||||
| JP2006203132A | ||||
| JP2010149222A | ||||
| JP7223152A | ||||
| JP2003071680A |
Foreign References:
| US5622875 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto