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Title:
GRINDING PAD CONDITIONING DEVICE, AND GRINDING DEVICE USING IT
Document Type and Number:
Japanese Patent JP2003048147
Kind Code:
A
Abstract:

To provide a grinding pad conditioning device capable of reliably detecting abnormality in a conditioning work of a grinding pad for grinding a work, and a grinding device using the grinding pad conditioning device.

The grinding pad conditioning device comprises a rotatable conditioning means for conditioning a surface of the grinding pad, a drive source for rotating the conditioning means, and a rotation detecting means for detecting the detection of the conditioning means.


Inventors:
MATSUMOTO HIDENORI
Application Number:
JP2001232678A
Publication Date:
February 18, 2003
Filing Date:
July 31, 2001
Export Citation:
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Assignee:
APPLIED MATERIALS INC
International Classes:
B24B53/00; B24B53/017; H01L21/304; (IPC1-7): B24B37/00; B24B53/00; H01L21/304
Domestic Patent References:
JPH11190405A1999-07-13
JP2001030169A2001-02-06
JP2000317835A2000-11-21
JP2000326210A2000-11-28
JP2000052230A2000-02-22
JPH0369736A1991-03-26
JP2003059873A2003-02-28
Attorney, Agent or Firm:
Yoshiaki Anzai



 
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