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Title:
GRINDING WHEEL
Document Type and Number:
Japanese Patent JP2010280041
Kind Code:
A
Abstract:

To provide a grinding wheel in which gettering effect can be maintained without lowering bending strength of a device, and a wafer can be ground without being damaged even when thickness of the wafer becomes thin.

The grinding wheel 5 for grinding a ground surface of a workpiece held by a rotatable chuck table includes a wheel base 51 provided with a grinding water supply hole 440 at its center, and a disk-like grinding stone 52 having a communication hole 521 communicating with the grinding water supply hole at its center, attached under a lower surface of the wheel base. Diamond abrasive grains with grain diameter not more than 5 μm are bonded with a vitrified bond, sintered, and formed in the disk-like grinding wheel. Distance from an inner circumference to an outer circumference of the communication hole 521 in a radial direction is set at a value longer than a radius of the workpiece held by the chuck table.


Inventors:
SEKIYA MINOSUKE
YAMAMOTO SETSUO
Application Number:
JP2009135865A
Publication Date:
December 16, 2010
Filing Date:
June 05, 2009
Export Citation:
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Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24D7/00; B24D3/00; B24D3/18
Domestic Patent References:
JPH03104567A1991-05-01
JP2007015046A2007-01-25
JP2006203132A2006-08-03
JPS58160752U1983-10-26
JPS598760U1984-01-20
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki



 
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