Title:
様々な厚さのワークピースのための把持システム
Document Type and Number:
Japanese Patent JP7328297
Kind Code:
B2
Abstract:
A method of gripping a substantially planar workpiece (W) while providing compensation for variations in thickness is described. During the process, the workpiece (W) is overdriven into a clamping member (9A, 9B) before clamping force is applied, and the positions of the clamping member before and after application of the clamping force are measured. These measurements are then used to control a compensating movement of the tooling table (2) and optionally a final lift of the conveyance rails (6A, 6B).
Inventors:
Andrew Mark Milner
Anthony Cheeseman
Michael westlake
Anthony Cheeseman
Michael westlake
Application Number:
JP2021173820A
Publication Date:
August 16, 2023
Filing Date:
October 25, 2021
Export Citation:
Assignee:
ASM Pte Ltd. Singapore Pte. Ltd.
International Classes:
B41F15/26; B41F15/08; B41M1/12; H01L21/683
Domestic Patent References:
| JP2013116584A |
Foreign References:
| US20050041851 |
Attorney, Agent or Firm:
Yasuhiko Murayama
Shinya Mihiro
Tatsuhiko Abe
Shinya Mihiro
Tatsuhiko Abe
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