Title:
GROOVE DEPTH MEASURING METHOD AND MEASURING DEVICE
Document Type and Number:
Japanese Patent JP2001201323
Kind Code:
A
Abstract:
To determine whether the groove depth is good or bad simply in a short time without a complicated measuring device.
Grooves different in an opening width are opened to the same depth at the same time, optical images thereof are observed to find a dark image of the groove in a boundary part between a dark image and a light image and a light image adjacent thereto, and a groove depth d is obtained from the opening width aK of the dark image and the opening width aK+1 of the light image.
Inventors:
KISHIMURA MICHIFUMI
Application Number:
JP2000011298A
Publication Date:
July 27, 2001
Filing Date:
January 20, 2000
Export Citation:
Assignee:
NEC CORP
International Classes:
G01B11/22; H01L21/66; (IPC1-7): G01B11/22; H01L21/66
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)
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