To provide a groove processing method which can reduce an inclination error not greater than 1 minute, or a position error not greater than 3 μm of the groove formed on a work piece, and form the groove with sufficient inclination accuracy or position accuracy, and grooved goods, and, an optical part or a precision part using the processing method.
When the groove processing start signal is outputted (step 1), the groove Gt for inclination measurement is formed on a trial processing object subject 15 (step 2). The inclination error θ of the groove for inclination measurement is measured (step 3), and an inclination of a tool is compensated (step 4). Next, the groove Gp for position measurement is formed (step 5), and a distance OGp from a reference plane O is measured (step 6). The relative position of the tool to a processing surface 10a is compensated from this measurement result (step 7), and the groove G1 is formed on in the processing surface (step 8).
INADA HISASHI
CHO SUSUMU
