Title:
ワイヤソーによる溝加工装置とその方法
Document Type and Number:
Japanese Patent JP6733022
Kind Code:
B2
Abstract:
To provide a groove machining device using a wire saw and a groove machining method using the same which can perform a step of forming a groove in one work-piece and a step of cutting a prescribed position in the work-piece, at the same time.SOLUTION: A groove machining device 1 according to the present invention comprises a pair of main rollers 2 and 2, a work-piece holder 4 installed to be movable in a vertical direction and a pair of sub rollers 3 and 3, where a plurality of annular grooves 2b and annular grooves 3b in which one wire 51 can be arranged are provided on an outer peripheral surface 2a of the main roller 2 and an outer peripheral surface 3a of the sub roller 3 respectively. The wire 51 is hung across the main rollers 2 and 2 with the wire fitted into the annular grooves 2b, so that a pair of wire groups 57a and 57b are formed above and below the main rollers 2 and 2. On the outer peripheral surface 3a of the sub roller 3, at a place in which the annular grooves 3b are not formed is formed an annular groove 3c in which three wires 51 can be arranged.SELECTED DRAWING: Figure 1
Inventors:
Sueji Takamichi
Application Number:
JP2019178975A
Publication Date:
July 29, 2020
Filing Date:
September 30, 2019
Export Citation:
Assignee:
Japan Fine Steel Co., Ltd.
International Classes:
B24B27/06; B23D61/18; B24B41/06; B24B47/26; B28D1/08; B28D5/04; H01L21/301; H01L21/304
Domestic Patent References:
| JP61293766A | ||||
| JP10277915A | ||||
| JP2015202546A | ||||
| JP9066458A |
Attorney, Agent or Firm:
Hiroshi Inoue