Title:
研磨基板からのスペクトルデータのグループ分け
Document Type and Number:
Japanese Patent JP6466131
Kind Code:
B2
Abstract:
Among other things, a computer-based method is described. The method comprises receiving, by one or more computers, a plurality of measured spectra reflected from a substrate at a plurality of different positions on the substrate. The substrate comprises at least two regions having different structural features. The method also comprises performing, by the one or more computers, a clustering algorithm on the plurality of measured spectra to separate the plurality of measured spectra into a number of groups based on the spectral characteristics of the plurality of measured spectra; selecting one of the number of groups to provide a selected group having a subset of spectra from the plurality of measured spectra; and determining, in the one or more computers, at least one characterizing value for the substrate based on the subset of spectra of the selected group.
Inventors:
David, Jeffrey Drew
Swedek, Bogslaw A.
Swedek, Bogslaw A.
Application Number:
JP2014214966A
Publication Date:
February 06, 2019
Filing Date:
October 22, 2014
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
B24B37/013; B24B49/12; B24B51/00; G01B11/06; H01L21/304
Domestic Patent References:
| JP2009505847A | ||||
| JP2011009679A |
Foreign References:
| US20120026492 | ||||
| KR20080090326A |
Attorney, Agent or Firm:
Sonoda Yoshitaka
Kobayashi Yoshinori
Kobayashi Yoshinori