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Patent Searching and Data


Title:
GROWING METHOD FOR CRYSTAL OF COMPOUND SEMICONDUCTOR
Document Type and Number:
Japanese Patent JPH05308052
Kind Code:
A
Abstract:

PURPOSE: To furnish a method for crystal growth of a compound semiconductor which enables growth of an epitaxial growth layer of a sphalerite type of an excellent crystal quality, with excellent reproducibility.

CONSTITUTION: In a method for crystal growth of a compound semiconductor wherein CdZnSe is made to grow epitaxially by an MOCVD method, a growth temperature Tg is set in a temperature region being higher than the higher one of Ti and Tj and lower than the lower one of Tk and Tl and Tc1 and Tg are set to be Tc1<Tg, when the transition temperature of CdSe is denotede by Tc1 and the low temperature side and the high temperature side of a step at which a growth rate becomes a determined rate of material transport by Ti and Tk respectively and when the transition temperature of ZnSe is denoted by Tc2 and the low temperature side and the high temperature side of the step at which the growth rate becomes the determined rate of material transport by Tj and Tl respectively.


Inventors:
PIITAA PAABURUTSUKU
KAMATA ATSUSHI
Application Number:
JP11095092A
Publication Date:
November 19, 1993
Filing Date:
April 30, 1992
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H01L21/205; (IPC1-7): H01L21/205
Attorney, Agent or Firm:
Takehiko Suzue