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Title:
ハーフトーン型位相シフトマスク
Document Type and Number:
Japanese Patent JP5239799
Kind Code:
B2
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Inventors:
Inazuki Yuichi
Ryuji Nagai
Morikawa Yasuko
Application Number:
JP2008310349A
Publication Date:
July 17, 2013
Filing Date:
December 05, 2008
Export Citation:
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Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
G03F1/32; G03F1/68; H01L21/027
Domestic Patent References:
JP11143047A
JP2010009038A
JP2001022048A
JP2008089835A
JP2008026627A
Foreign References:
WO2009157506A1
Attorney, Agent or Firm:
Satoshi Kanayama
Keiko Fukamachi
Hideo Ito
Hiromi Fujimasu
Naoki Goto



 
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