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Title:
HANDLER UNIT
Document Type and Number:
Japanese Patent JP2008173746
Kind Code:
A
Abstract:

To materialize a handler unit capable of preventing contamination.

In the handler unit having a pickup for conveying devices from one pocket to the other pocket by adsorbing the device at its one end, and an air passage which is arranged on the pickup and has an opening at the end and applies negative pressure at the other end, the handler unit comprises a pressurized air applying means which is connected with the other end of the air passage and applies the pressurized air to the air passage at a designated time, and a foreign matters collection means oppositely arranged by moving the end of the pickup at the time of motions of the pressurized air applying means, into which the pressurized air applied to the air passage and foreign matters flows.


Inventors:
KAWAMURA SHINICHIRO
Application Number:
JP2007011467A
Publication Date:
July 31, 2008
Filing Date:
January 22, 2007
Export Citation:
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Assignee:
YOKOGAWA ELECTRIC CORP
International Classes:
B25J15/06; G01R31/26



 
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