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Patent Searching and Data


Title:
HANDLING DEVICE FOR QUARTZ CRUCIBLE AND METHOD FOR HANDLING QUARTZ CRUCIBLE
Document Type and Number:
Japanese Patent JPH11255583
Kind Code:
A
Abstract:

To provide a quartz crucible handing device that can turn a quartz crucible of a heavy weight and a large diameter in a limited space and receive it into the susceptor of a carbon crucible without using man power and free from the influence of contamination and the method for handling a quartz crucible.

The crucible-turning device and the crucible-receiving device are combined so that they may be arranged to the same position. Particularly, the quartz crucible is stably and smoothly rotated and placed in the susceptor 60 with the hand device 32 for holding and rotating the quartz crucible 50. The quartz crucible is placed on the pallet and is made liftable.


Inventors:
MATSUBARA JUNICHI
YAMAGISHI HIROTOSHI
Application Number:
JP8030798A
Publication Date:
September 21, 1999
Filing Date:
March 12, 1998
Export Citation:
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Assignee:
SUPER SILICON KENKYUSHO KK
International Classes:
C30B15/10; C30B29/06; (IPC1-7): C30B15/10
Attorney, Agent or Firm:
Nihei Masataka