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Patent Searching and Data


Title:
HANDLING EQUIPMENT FOR CLEAN ROOM
Document Type and Number:
Japanese Patent JPS60165446
Kind Code:
A
Abstract:

PURPOSE: To suppress the invasion of fine particles from a running pipeline into the clean room by providing a pressure regulating mechanism, reducing a pressure in a loading pipeline section to a value lower than the internal pressure of the clean room.

CONSTITUTION: Goods are supplied or taken out under a condition that a door 2 is opened after the opening operation of first airflow intercepting gate G1 and the pressure in the loading pipe section (l) is reduced by the suction of a blower 20 to a pressure lower than the pressure in the clean room, thereby flowing the air in the clean room A into the loading pipeline section (l). A purifying device K, effecting with respect to the piepline section (l), is constituted of a ventilating hole 24b, communicating with the discharging port 23b of a fan 22 arranged below the loading pipeline section (l) and formed on the upper part of the side wall of the pipeline section (l), and a HEPA filter 25 provided in the communicating flow path between the discharging port 23b and the ventilating hole 24b. Accordingly, the invasion of the fine particles in the running pipeline L into the clean room A may be suppressed surely by opening the door 2 after the inside of the pipeline section (l) is cleaned.


Inventors:
HAMAZAKI TADASHI
OOGAWARA TETSUO
Application Number:
JP2244084A
Publication Date:
August 28, 1985
Filing Date:
February 07, 1984
Export Citation:
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Assignee:
DAIFUKU MACHINERY WORKS
International Classes:
B65G69/20; F24F7/06; H01L21/02; H01L21/677; (IPC1-7): B65G69/20; F24F7/06; H01L21/02
Attorney, Agent or Firm:
Kitamura Osamu