PURPOSE: To provide a handling mechanism which can hold an object even if the object is not provided with a specific region for holding.
CONSTITUTION: The title handling mechanism has a base 2 and a plurality of clicks 3, 4, 5, 6,attached to the base 2 for holding an object. The clicks 3, 4, 5, 6, are arranged at a location for holding a side surface of a ceramic substrate 1, a click tip part of a tip thereof is sized not to come into contact with an edge part of the side surface of the ceramic substrate 1, and it is formed to realize an arbitrary angle and to apply desired force per unit area. Contact- type displacement sensors 7, 8, 9, 10 are attached to the clicks, a location of the side surface of the ceramic substrate 1 is detected, and it is desirable to calculate location and position thereof based on the location information.
HOSHI SHIRO
MIO SHIGEMI
TAKAGI MASAHIRO
