Title:
HANDOTAISOCHINO RIIDOBONDEINGUHOHO
Document Type and Number:
Japanese Patent JPS5162975
Kind Code:
A
Inventors:
MAEDA FUSAO
SAITO YOSUKE
SAITO YOSUKE
Application Number:
JP13864574A
Publication Date:
May 31, 1976
Filing Date:
November 30, 1974
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
H01L21/60; (IPC1-7): H01L21/60
Domestic Patent References:
| JPS4924363A | 1974-03-04 |
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