Title:
HANDOTAISOCHINO SEIZOHOHO
Document Type and Number:
Japanese Patent JPS5118478
Kind Code:
A
Inventors:
NISHI SADAAKI
KAWAMOTO TAKANORI
KAWAMOTO TAKANORI
Application Number:
JP8602174A
Publication Date:
February 14, 1976
Filing Date:
July 29, 1974
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H01L21/3063; H01L21/306; H01L29/88; (IPC1-7): H01L21/306; H01L29/88