To provide a hard film having excellent lubricating characteristics and high hardness and an application method of the film, and to provide a tool for metal plastic working, having a working surface coated with the above hard film.
The hard film is applied on a substrate surface to be in contact with another material, by an arc ion plating method, wherein the hard film comprises titanium carbide having a half value width of 1.75° or more of the (111) plane in a NaCl type crystalline structure. The tool for metal plastic working has a working face coated with the above hard film. The application method of the hard film on a substrate surface is carried out by arc ion plating, wherein a hard film comprising titanium carbide is applied on a substrate surface by arc ion plating using a titanium target, while a bias voltage of -120 to -150V is applied on the surface and methane gas is introduced to control the inner pressure of the furnace to 2.8 Pa to 3.8 Pa.
Inoue, Kenichi
HITACHI TOOL ENGINEERING LTD
