Title:
HARD FILM EXCELLENT IN LUBRICITY AND ABRASION RESISTANCE, AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2015054995
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a hard film excellent in lubricity and abrasion resistance that has a low friction coefficient and hardly seizes up under a slide environment.SOLUTION: A hard film has a composition formula: MCN, (wherein M is composed of one or more elements selected from the group consisting of Ti, Cr, and Al, or one or more elements selected from the group consisting of the above elements, a group IV element, a group V element, a group VI element, Si, Y, and rare-earth element). The film satisfies the expressions: 0.01≤a≤0.50, 0.10≤b≤0.50, and 0<1-a-b on an atom ratio of each element. The film has a carbon-carbon bond ratio (Y) of 0.2 or higher relative to a whole bond ratio of carbon in the film.
Inventors:
YAMAMOTO KENJI
Application Number:
JP2013189626A
Publication Date:
March 23, 2015
Filing Date:
September 12, 2013
Export Citation:
Assignee:
KOBE STEEL LTD
International Classes:
C23C14/06; B23B27/14; C23C14/32
Domestic Patent References:
| JP2006316351A | 2006-11-24 | |||
| JP2011190529A | 2011-09-29 | |||
| JP2009052134A | 2009-03-12 | |||
| JP2010180479A | 2010-08-19 | |||
| JP2000107909A | 2000-04-18 | |||
| JP2009155721A | 2009-07-16 | |||
| JP2003071610A | 2003-03-12 | |||
| JP2004099966A | 2004-04-02 |
Other References:
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FENG, W. ET AL.: "Titanium carbonitride films on cemented carbide cutting tool prepared by pulsed high energy density", APPL. SURF. SCI., vol. 253, JPN6014046218, 4 December 2006 (2006-12-04), NL, pages 4923 - 4927, ISSN: 0003378517
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LU, Y. H. ET AL.: "Effect of N content on phase configuration, nanostructure and mechanical behaviors in Ti-Cx-Ny thin", APPL. SURF. SCI., vol. 255, JPN6014046224, 16 April 2009 (2009-04-16), NL, pages 7858 - 7863, ISSN: 0003378519
嶋村公二 他: "PVDコーティング工具による難削材の高能率・高精度切削(第１報)", 精密工学会誌, vol. 76, JPN6014046228, 5 October 2010 (2010-10-05), JP, pages 1182 - 1187, ISSN: 0003378520
CHENG. Y. H. ET AL.: "Internal stresses in TiN/Ti multilayer coatings deposited by large area filtered arc deposition", J. APPL. PHYS., vol. 104, JPN6014046229, 4 November 2008 (2008-11-04), US, pages 093502 - 1, ISSN: 0003378521
D. V. SHTANSKY, ET AL.: "Comparative investigation of TiAlC(N), TiCrAlC(N), and CrAlC(N) coatings deposited by sputtering of", SURFACE & COATINGS TECHNOLOGY, vol. vol. 203, Issue 23, JPN6016050839, 27 May 2009 (2009-05-27), pages 3595 - 3609, ISSN: 0003473473
FENG, W. ET AL.: "Titanium carbonitride films on cemented carbide cutting tool prepared by pulsed high energy density", APPL. SURF. SCI., vol. 253, JPN6014046218, 4 December 2006 (2006-12-04), NL, pages 4923 - 4927, ISSN: 0003378517
CHANG, Y.-Y. ET AL.: "Characterization of TiCr(C,N)/amorphous carbon coatings synthesized by a cathodic arc deposition pro", THIN SOLID FILMS, vol. 515, JPN6014046221, 12 December 2006 (2006-12-12), NL, pages 4722 - 4726, ISSN: 0003378518
LU, Y. H. ET AL.: "Effect of N content on phase configuration, nanostructure and mechanical behaviors in Ti-Cx-Ny thin", APPL. SURF. SCI., vol. 255, JPN6014046224, 16 April 2009 (2009-04-16), NL, pages 7858 - 7863, ISSN: 0003378519
嶋村公二 他: "PVDコーティング工具による難削材の高能率・高精度切削(第１報)", 精密工学会誌, vol. 76, JPN6014046228, 5 October 2010 (2010-10-05), JP, pages 1182 - 1187, ISSN: 0003378520
CHENG. Y. H. ET AL.: "Internal stresses in TiN/Ti multilayer coatings deposited by large area filtered arc deposition", J. APPL. PHYS., vol. 104, JPN6014046229, 4 November 2008 (2008-11-04), US, pages 093502 - 1, ISSN: 0003378521
D. V. SHTANSKY, ET AL.: "Comparative investigation of TiAlC(N), TiCrAlC(N), and CrAlC(N) coatings deposited by sputtering of", SURFACE & COATINGS TECHNOLOGY, vol. vol. 203, Issue 23, JPN6016050839, 27 May 2009 (2009-05-27), pages 3595 - 3609, ISSN: 0003473473
Attorney, Agent or Firm:
Hisakazu Ueki
Hisahiko Ueki
Tadashi Sugawa
Hiroaki Ito
Junko Uemura
Hisahiko Ueki
Tadashi Sugawa
Hiroaki Ito
Junko Uemura
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