Title:
HARDMASK
Document Type and Number:
Japanese Patent JP2015063523
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a composition containing an organometallic compound having a chromophore moiety in a metal polymer backbone which allows a wider range of n/k values such that substrate reflectivity can be controlled under various conditions.SOLUTION: The present invention provides an organometallic compound represented by the formula (1), and a composition comprising the organometallic compound and an organic solvent. [R2 is (C1-C20)hydrocarbyl; M1 is a Group 3 to Group 14 metal; G is R3b-Ch-R3b or Ch(OM1L1mOR2)c; Ch is a chromophore moiety; R3 is a C1-C12 divalent linking group; R4 is H, R2 or M(L1)mOR2; L1 is a ligand; m refers to the number of ligands and is an integer from 1 to 4; a is an integer from 1 to 20; each b is independently an integer from 0 to 25; and c=1 or 2.]
Inventors:
YAMADA SHINTARO
WANG DEYAN
SABRINA WONG
KONG LIU
CHENG BAI SU
WANG DEYAN
SABRINA WONG
KONG LIU
CHENG BAI SU
Application Number:
JP2014179115A
Publication Date:
April 09, 2015
Filing Date:
September 03, 2014
Export Citation:
Assignee:
ROHM & HAAS ELECT MAT
International Classes:
C07C49/92; C07C33/26; C07D251/32; C08G79/14; C08L85/00
Domestic Patent References:
| JP2002053669A | 2002-02-19 | |||
| JP2005289885A | 2005-10-20 | |||
| JP2005247595A | 2005-09-15 | |||
| JP2006508377A | 2006-03-09 |
Other References:
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SUGITA ET AL.: "Electrical and optical properties of organic-titanium hybrid polymer, poly(2,3-dicyanophenyl bis-2,4", CHEMICAL PHYSICS LETTERS, vol. 416(1-3), JPN6018018646, 2005, pages 79 - 82, XP027647323, DOI: doi:10.1016/j.cplett.2005.09.057
SYDORA ET AL.: "Syntheses and electrochemistry of (p-XC6H4O)6W (1-X, X=H, CH3, OCH3, Cl, Br, OH, OCH2Ph) and (p-XC6H", POLYHEDRON, vol. 23(17), JPN6018018647, 2004, pages 2841 - 2856
SIMPURA ET AL.: "Symmetric esters by Tischtschenko reaction of aldehydes catalyzed by bi- and tridentate catalysts de", TETRAHEDRON, vol. 57(49), JPN6018018649, 2001, pages 9867 - 9872, XP004322468, DOI: doi:10.1016/S0040-4020(01)01004-3
SEN ET AL.: "Synthesis, structure, and reactivity of homoleptic cerium(IV) and cerium(III) alkoxides", INORGANIC CHEMISTRY, vol. 31(3), JPN6018018650, 1992, pages 473 - 479
FURUKAWA ET AL.: "Electronic behavior of titanium oxid-carbon cluster composite material obtained by calcinating a tit", MATERIAL TECHNOLOGY, vol. 23(5), JPN7018001634, 2005, pages 348 - 350
SUGITA ET AL.: "Electrical and optical properties of organic-titanium hybrid polymer, poly(2,3-dicyanophenyl bis-2,4", CHEMICAL PHYSICS LETTERS, vol. 416(1-3), JPN6018018646, 2005, pages 79 - 82, XP027647323, DOI: doi:10.1016/j.cplett.2005.09.057
SYDORA ET AL.: "Syntheses and electrochemistry of (p-XC6H4O)6W (1-X, X=H, CH3, OCH3, Cl, Br, OH, OCH2Ph) and (p-XC6H", POLYHEDRON, vol. 23(17), JPN6018018647, 2004, pages 2841 - 2856
SIMPURA ET AL.: "Symmetric esters by Tischtschenko reaction of aldehydes catalyzed by bi- and tridentate catalysts de", TETRAHEDRON, vol. 57(49), JPN6018018649, 2001, pages 9867 - 9872, XP004322468, DOI: doi:10.1016/S0040-4020(01)01004-3
SEN ET AL.: "Synthesis, structure, and reactivity of homoleptic cerium(IV) and cerium(III) alkoxides", INORGANIC CHEMISTRY, vol. 31(3), JPN6018018650, 1992, pages 473 - 479
FURUKAWA ET AL.: "Electronic behavior of titanium oxid-carbon cluster composite material obtained by calcinating a tit", MATERIAL TECHNOLOGY, vol. 23(5), JPN7018001634, 2005, pages 348 - 350
Attorney, Agent or Firm:
Patent Business Corporation Sender International Patent Office