To provide a vacuum membrane pump having a small number of parts and a simple structure, able to be economically manufactured, and having high operating efficiency.
A vacuum membrane pump 1 is substantially constituted of a housing 2, a membrane 3 and a head 5. The head 5 is engaged with a seal edge 11 of the membrane 3 at a seal surface 6 to form a seal. A pump chamber 4 is formed between the head 5 and the membrane 3. The head cast of glass is provided with an opening for housing a valve element 9 on the side part 7 separated from the pump chamber. The seal edge 11 of the membrane 3 is seated on a shoulder part 10 of the housing 2 and engaged with the seal surface 6 of the head 5. The valve element 9 is engaged with the inside of the opening 8 of the head 5. A close structure connected to the housing 2 can apply axial force to the valve element 9. The valve element 9, the head 5, the membrane 3 and the housing 2 are pressed by the close structure to form a sealed connecting part.
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