Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
HEAD OF VACUUM MEMBRANE PUMP, AND VACUUM MEMBRANE PUMP
Document Type and Number:
Japanese Patent JPH09195945
Kind Code:
A
Abstract:

To provide a vacuum membrane pump having a small number of parts and a simple structure, able to be economically manufactured, and having high operating efficiency.

A vacuum membrane pump 1 is substantially constituted of a housing 2, a membrane 3 and a head 5. The head 5 is engaged with a seal edge 11 of the membrane 3 at a seal surface 6 to form a seal. A pump chamber 4 is formed between the head 5 and the membrane 3. The head cast of glass is provided with an opening for housing a valve element 9 on the side part 7 separated from the pump chamber. The seal edge 11 of the membrane 3 is seated on a shoulder part 10 of the housing 2 and engaged with the seal surface 6 of the head 5. The valve element 9 is engaged with the inside of the opening 8 of the head 5. A close structure connected to the housing 2 can apply axial force to the valve element 9. The valve element 9, the head 5, the membrane 3 and the housing 2 are pressed by the close structure to form a sealed connecting part.


Inventors:
ARUTOUA SHIYUPURINGU
Application Number:
JP34522196A
Publication Date:
July 29, 1997
Filing Date:
December 25, 1996
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
BUECHI LAB TECH
International Classes:
F04B39/10; F04B45/04; F04B53/00; (IPC1-7): F04B45/04; F04B45/04; F04B39/10
Attorney, Agent or Firm:
Kyozo Yuasa (6 people outside)