Title:
HEAT CONDUCTION TYPE SENSOR
Document Type and Number:
Japanese Patent JP2016200441
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a heat conduction type sensor that is resistant to impact and vibration and can be freely fixed.SOLUTION: The heat conduction type sensor 1 according to the present invention includes: non-alkali glass; a pipe base material 2 made of quartz or alumina; a sensitive membrane 3 on the outer surface of the base material 2 having a variable resistance according to temperatures; a first electrode film 4a over a part of the sensitive membrane 3; and a second electrode film 4b over another part of the sensitive membrane 3.SELECTED DRAWING: Figure 1
Inventors:
OKANO YUKIKO
TAJIRI SHUICHI
ONISHI TAKANORI
OGAWA SOICHI
MIMA KOJI
TAJIRI SHUICHI
ONISHI TAKANORI
OGAWA SOICHI
MIMA KOJI
Application Number:
JP2015079058A
Publication Date:
December 01, 2016
Filing Date:
April 08, 2015
Export Citation:
Assignee:
OKANO SEISAKUSHO:KK
OGAWA SOICHI
MIMA KOJI
OGAWA SOICHI
MIMA KOJI
International Classes:
G01L21/10
Attorney, Agent or Firm:
Patent Business Corporation Minori Patent Office