Title:
試薬供給システムの凍結防止用の熱交換器
Document Type and Number:
Japanese Patent JP6527533
Kind Code:
B2
Abstract:
Apparatus and methods that provide a reagent gas in a foreline abatement system are provided herein. In some embodiments, a reagent delivery system includes a water tank having an inner volume that holds a reagent liquid when disposed therein, and a heat exchanger having a central opening disposed in the inner volume and configured to keep a top surface of the reagent liquid from freezing when reagent liquid is disposed within the water tank.
Inventors:
Dickinson Colin John
Application Number:
JP2016571282A
Publication Date:
June 05, 2019
Filing Date:
April 30, 2015
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/31; C23C16/448; F28F17/00; H01L21/205
Domestic Patent References:
| JP2005111433A | ||||
| JP4004572A | ||||
| JP2002042847A | ||||
| JP2005106418A | ||||
| JP2009101333A | ||||
| JP2010119935A | ||||
| JP2013137940A | ||||
| JP2011511920A |
Attorney, Agent or Firm:
Takaki Nishijima
Disciple Maru Ken
Shinichiro Tanaka
Fumiaki Otsuka
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Kudo Akira
Disciple Maru Ken
Shinichiro Tanaka
Fumiaki Otsuka
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Kudo Akira