Title:
HEAT-GENERATING SETTER AND CONTINUOUS HEAT TREATMENT FURNACE USING THE SAME
Document Type and Number:
Japanese Patent JP2002293558
Kind Code:
A
Abstract:
To provide a heater for a setter used only for placing a flat display panel to be heat treated, and to enhance degree of freedom in the heat treating method and the design of the heat treating furnace.
This setter used for placing the flat display panel for the heat treatment is composed of an electroconductive material and the setter itself generates heat by energizing.
Inventors:
TANIGUCHI SATOSHI
AOKI MICHIRO
AOKI MICHIRO
Application Number:
JP2001095451A
Publication Date:
October 09, 2002
Filing Date:
March 29, 2001
Export Citation:
Assignee:
NGK INSULATORS LTD
International Classes:
B65G49/06; C03B32/00; C04B41/88; F27B9/06; F27D3/12; F27D11/02; H01L21/68; H01L21/683; (IPC1-7): C03B32/00; B65G49/06; C04B41/88; F27B9/06; F27D3/12; F27D11/02; H01L21/68
Attorney, Agent or Firm:
Ippei Watanabe
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