Title:
HEAT PROCESSOR HAVING FILTER DUST PROCESSING FUNCTION
Document Type and Number:
Japanese Patent JP3949494
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To process particles generated from a packing part of a clean oven without having it enter a heat processing chamber and to maintain cleanliness of the chamber.
SOLUTION: This clean oven is a device in which heat processing air is made to pass from a circulation path 5 provided with a blower 4 and having a filter 3 mounted at an inlet frame 1 through the packing 2 and is made to enter the heat processing chamber 6, and the device has an outlet frame 7 dividing a gap portion 71 on the indoor side of the packing and an air bleed port 8 communicating to the intake side of the blower 4. The indoor air always enters the gap portion 71 through between the outlet frame 7 and a peripheral frame 31 of the filter 3, passes the circulation path through the air bleed port 8 and is sucked by the blower 4, and when a dust is generated at the packing 2 by stress received at temperature rise/drop, it is discharged through the gap portion but not brought into the chamber so that the cleanliness of the room is maintained.
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Inventors:
Yukameo Nagano
Ikuo Kanamori
Ikuo Kanamori
Application Number:
JP2002109748A
Publication Date:
July 25, 2007
Filing Date:
April 11, 2002
Export Citation:
Assignee:
ESPEC CORPORATION
International Classes:
F24F7/00; B01D46/00; B01D46/42; C03B32/00; F24F7/06; F27B17/00; F27D7/04; G02F1/13; H01L21/324; (IPC1-7): F24F7/00; B01D46/00; B01D46/42; F24F7/06; F27D7/04; H01L21/324
Domestic Patent References:
| JP59003245U | ||||
| JP2000088306A | ||||
| JP62213630A | ||||
| JP11231943A |
Attorney, Agent or Firm:
Kenji Kageyama