To prevent the downward movement of a resistance heating element caused by gravity while allowing the radial movement of the resistance heating element accompanied by thermal expansion/shrinkage and improve the durability of the resistance heating element.
A heat treat furnace is provided with: a cylindrical heat insulating material 4 surrounding a treatment container 3 for storing and heat-treating a treated object w; the spiral resistance heating element 5 arranged along the inner peripheral face of the heat insulating material 4; support bodies 13 provided on the inner peripheral face of the heat insulating material 4 at predetermined pitches and supporting the resistance heating element 5 so as to enable thermal expansion/shrinkage in the radial direction; a plurality of terminal plates 14 arranged on the outer side of the resistance heating element 5 at appropriate axial intervals, radially penetrated through the heat insulating material 4 and extended to the outside; and a movement inhibition member 15 provided at each turn of the resistance heating element 5, abutting on one-side faces of the support bodies 13 and inhibiting the downward movement of the resistance heating element 5.
YAMAGA KENICHI
NAKAO MASARU
| JPH0864546A | 1996-03-08 | |||
| JPH10233277A | 1998-09-02 | |||
| JPH07183243A | 1995-07-21 | |||
| JPS6183030U | 1986-06-02 | |||
| JP2005241135A | 2005-09-08 | |||
| JP2001255069A | 2001-09-21 |
Noriyuki Kanasaka
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