Title:
HEAT-TREATING CONDUCTIVE THIN FILM USING A-C MAGNETIC FIELD
Document Type and Number:
Japanese Patent JP10070130
Kind Code:
A
Abstract:
To heat-treat a conductive thin film uniformly at a good reproducibility and low cost for a short time.
An a-c magnetic field 15 perpendicular to the surface of a conductive thin film 1 formed on an insulation structure 17 is applied to the substrate and the film 1 classified in semiconductors such as amorphous Si having specific resistivity of less than 1010Ωcm at a frequency f≥1Hz and field intensity H≥1V/cm to generated an induced current 16 in the conductive film which selectively inductively heats only the semiconductor even in a laminate of insulators and semiconductor.
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Inventors:
Nakahara, Yasuo
Application Number:
JP1996000224117
Publication Date:
March 10, 1998
Filing Date:
August 26, 1996
Export Citation:
Assignee:
SANYO ELECTRIC CO LTD
International Classes:
H01L21/8247; G05D23/19; H01L21/20; H01L21/265; H01L21/324; H01L21/336; H01L27/115; H01L29/786; H01L29/788; H01L29/792; H01L21/70; G05D23/19; H01L21/02; H01L27/115; H01L29/66; (IPC1-7): H01L21/324; G05D23/19; H01L21/336; H01L21/8247; H01L27/115; H01L29/786; H01L29/788; H01L29/792
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