Title:
HEAT TREATING DEVICE IN MAGNETIC FIELD
Document Type and Number:
Japanese Patent JP3533572
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a heat treating device in a magnetic field capable of improving characteristic of a disclike member to be treated such as a magnetic disc uniformly in the circumferential direction, saving energy, and controlling temperature with high precision.
SOLUTION: This heat treating device in a magnetic field performs heat treatment in a vacuum vessel by generating a radial magnetic field in the radial direction of the member to be treated by a pair of coils arranged opposingly and symmetrically on the same upper and lower shaft of the disclike member to be treated. Two pairs of coils are inserted and fixed into 9a and 9b up and down of a cylindrical heat block 6 having non-magnetism and high heat conduction property. These pairs of coils are excited in a reverse phase to generate a radial magnetic field at a position of a sample chamber 10 in which the member to be treated is inserted. Heating of the member to be treated is performed by Joule heat and a heater coil wound in a non-inducing manner around outer periphery of the heat block. Coil pressing flanges 8a, 8b are replaced with flanges in which a spiral thin channel for refluxing a medium for cooling is buried to control temperature with high precision in processes of heating and removing heat.
Inventors:
Sasaki, Isao
Sasaki, Mansuke
Sasaki, Atsushi
Mori, Hitoshi
Sasaki, Mansuke
Sasaki, Atsushi
Mori, Hitoshi
Application Number:
JP2002193972A
Publication Date:
May 31, 2004
Filing Date:
May 29, 2002
Export Citation:
Assignee:
TESLA:KK
International Classes:
F27B5/04; F27B5/06; F27B5/14; G11B5/84; (IPC1-7): F27B5/04; F27B5/06; F27B5/14; G11B5/84