HEAT-TREATING DEVICE FOR SUBSTRATE

Japanese Patent JP2790390

B2

PURPOSE: To improve treating capabilities per unit time by cooling compulsively a furnace core tube through flowing gas for cooling between the furnace core tune and a heating system in a condition of blocked influence caused by remaining heat from the heating system due to an interrupting cylinder after heat treatment.
CONSTITUTION: In a condition where an interrupting cylinder 13 is positioned at a non-heat interruption place, a heater unit 6 is electrically energized, and prescribed heat treatment is made for a substrate W. After completing heat treatment on the substrate W, cooling water is supplied in a condition where the interrupting cylinder is elevated to a heat interruption place, and the interrupting cylinder 13 is cooled. While at the same time, outside air is made to flow as cooling gas between the outside of a furnace core tube 1 and the inside of the heater unit 6, through cooling as supplying means. Therefore, while interrupting the influence due to remaining heat from the heater unit 6, a furnace core tube 1 can be cooled. As a result, treatment capability per unit time can be improved.

JP4036598	Heat treatment equipment
JP3230296	ROTARY HEAT TREATMENT FURNACE
JPH11281258	HIGH TEMPERATURE SEALED CONTAINER

KUROIWA TOORU
MURAOKA JUSUKE

JP4223592A

August 27, 1998

January 30, 1992

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DAINIPPON SUKURIIN SEIZO KK

F27B5/06; F27B17/00; F27D9/00; H01L21/22; H01L21/31; (IPC1-7): H01L21/31; F27B5/06; F27B17/00; F27D9/00; H01L21/22

JP3185818A
JP2138728A

Tsutomu Sugitani

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