To provide a vacuum treatment apparatus capable of equalizing temperature of a workpiece.
A temperature control unit 30 for controlling the temperature of the workpiece 2 is provided in an anode electrode 31. The temperature control unit 30 includes a heater 33, a cooling tube 34 and a substance 35 with low thermal conductivity. The cooling tube 34 enters the anode electrode 31 from an end surface 31T and is horizontally installed along with the heater 33 along a surface 31S of the anode electrode 31. A cooling medium is introduced from the end surface 31T so as to flow through the cooling tube 34. The substance 35 with low thermal conductivity extends at a prescribed length L2 to enter the anode electrode 31 from the end surface 31T while surrounding the cooling tube 34, thereby filling the space between the cooling tube 34 and the anode electrode 31 partially in the longitudinal direction. The substance 35 with low thermal conductivity has a thermal conductivity lower than that of a part at which the remainder of the cooling tube 34 in the longitudinal direction directly contacts the anode electrode 31.
TSUNASAWA HIROSHI
MURAKAMI KOJI
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