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Title:
HEAT TREATMENT APPARATUS, METHOD FOR DETECTING CARBON COMPONENT IN ATMOSPHERIC GAS, AND METHOD FOR MANUFACTURING CERAMIC ELECTRONIC COMPONENT
Document Type and Number:
Japanese Patent JP2004123524
Kind Code:
A
Abstract:

To insure that the organic components volatilized from ceramic shaped articles in a heat treatment process can be surely detected and that the exact heat treatment can be applied to the ceramic shaped articles and the rate of nondefective units can be improved by the results of the detection.

The heat treatment apparatus is provided with a first heat treatment space 3 for heat treating the ceramic shaped articles containing the organic components, a conversion section 4 for converting the carbon components included in a prescribed amount of the atmospheric gas taken out of the first heat treatment space 3 to a specific carbon compound, and a detection section 5 for detecting the component ratio of the specific carbon compound in the atmospheric gas.


Inventors:
Otsuka, Daisuke
Ito, Hideo
Akimoto, Shigeru
Yamamoto, Atsushi
Application Number:
JP2003000319640
Publication Date:
April 22, 2004
Filing Date:
September 11, 2003
Export Citation:
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Assignee:
MURATA MFG CO LTD
International Classes:
G01N21/35; C04B35/638; F27D19/00; F27D21/00; G01N21/31; C04B35/63; F27D19/00; F27D21/00; (IPC1-7): C04B35/638; F27D19/00; F27D21/00; G01N21/35