Title:
HEAT TREATMENT APPARATUS AND TEMPERATURE CONTROL METHOD
Document Type and Number:
Japanese Patent JP2018113375
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a heat treatment apparatus capable of converging to a predetermined temperature in a short time.SOLUTION: The heat treatment apparatus includes: a processing container for accommodating a substrate; a heater for heating the substrate accommodated in the processing container; a furnace body provided around the processing container; a blower that supplies a refrigerant to a space between the processing container and the furnace body; and a control unit that has a continuous operation mode in which the blower is continuously energized and an intermittent operation mode in which energization and de-energization of the blower are repeated and controls driving of the blower on the basis of a command voltage. When the command voltage is greater than 0 V and smaller than a predetermined threshold voltage, the control unit drives the blower in the intermittent operation mode.SELECTED DRAWING: Figure 1
Inventors:
YAMAGUCHI TATSUYA
OBARA KAZUTERU
KIKUCHI YASUAKI
YOSHII KOJI
OBARA KAZUTERU
KIKUCHI YASUAKI
YOSHII KOJI
Application Number:
JP2017003548A
Publication Date:
July 19, 2018
Filing Date:
January 12, 2017
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/31; F27B5/18; F27D9/00; F27D19/00; H01L21/22
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito