To provide a heat treatment apparatus, with which installing cost of a thermocouple is reduced, and a signal from the thermocouple is not required to be calibrated.
An in-furnace temperature sensor of a reference area A1 has a first thermocouple 81 comprising an R thermocouple or an S thermocouple, and a second thermocouple 82 comprising another thermocouple; and in-furnace temperature sensors of other regions A2 to A10 has the second thermocouple 82. The second thermocouple 82 of the reference region A1 and the second thermocouples 82 of the other regions A2 to A10 are connected to an electromotive force difference circuit 83. A temperature difference between the reference region A1 and the other regions A2 to A10 is determined by the electromotive force difference circuit 83; a temperature in the reference region A1 is determined by the first thermocouple 81 of the reference region A1; and a temperature in each other region A2 to A10 is determined by a temperature difference determined by the temperature in the reference region A1 and the temperature difference determined in the electromotive force difference circuit 83.
| JP2012109520A | 2012-06-07 | |||
| JPS63121431U | 1988-08-05 | |||
| JP2002110556A | 2002-04-12 | |||
| JP2003035607A | 2003-02-07 | |||
| JP2006093377A | 2006-04-06 | |||
| JPH11219888A | 1999-08-10 | |||
| JPH02194410A | 1990-08-01 |
Hiroyuki Nagai
Katsuomi Isogai
Satoshi Nazuka
Junpei Okada
Hideyuki Mori
Yukihiro Hotta